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.. , .. , .. , .. - , , ................................................................................................................13 .. , .. , .. : .................................................................................................................................................20 A. Pushkarev, Ai-Min Zhu, Xiao-Song Li, R. Sazonov PLASMA CHEMICAL CONVERSION OF METHANE: ACHIEVEMENTS AND FUTURE PROSPECTIVES...................................................................................................................................................23 .. , .. ..................................................................................................................................................30 .. , .. , .. , .. ............................................................................................................................34 .. , .. .............................................................................................................38 .. , .. , .. ................................................................42 .. , .. ................................................................................................................46 D. Shamiryan, V. Paraschiv, A. Milenin, W. Boullart and M. R. Baklanov PLASMA ETCHING: FROM MICRO- TO NANOSCALE DEVICE MANUFACTURING................................ - ............................ - ............................................................................................. , .. .......................................... , .. - ............................................................... , .. : - ........................................................................................ , .. , .. - ............................................................................................................................................................, ............................................................................................................................................................ , .. , .. ............................................................................................. ٨ ..................................................................................................................... , .. ....................................................................................................................................................... I .. , .. 2 ...................................... , .. - ...................................................................................................................................................... , . . , .. , .. , .. TaN .......................................................................................................................... , .. , .. , .. Cl2/O2/N2 ........................... , .. , .. ........................................................... , .. , .. , .. , .. .

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............................................. , .. ............................................................... - N2(A3+U,V) .................................................................................................... , .. , .. ............................... - : ...................................................................................................G. Cicala1, E.De Tommaso1, A.C. Rain2, A. Boggia2, Yu.A. Lebedev3, V.A. ShakhatovSTUDY OF N2 DC DISCHARGE AT LOW PRESSURE BY OPTICAL EMISSION SPECTROSCOPY AND NUMERICAL SIMULATION..................................................................................... , .. ..................................................... , .. , . - ........................................ , .. , .. 2 2+Ar.............................................................................................................. , .. , .. , .. ................................................................................................................... II .. ....................................... , .. , .. ............................................................................................................... , .. , ................................ , .. , .. ....................................................................................................... , . , .. , .. , .. .............................................................................................................................................................. , .. , .. , .. ........................................................................................................................................................... , .. , .. - ................................................................................................... , .. , .. ................. , .. , .. ......................................................................................................... , .. , .. ................................... , .. , .. - ........................................................................................................................ , . . , . . ............................................................................................................ , .. , .. ........................................................................................................................... , .. * ................................................................ , .. , .. ........................................................................................................................................................ , .. .............................................................................................................................................





, .. - ...................................................................... , .. , .. , .. 2+Ar.............................................................................................................................. III .. , .. , .. , .. 2+Ar................................................... , .. , .. ............................ , .. O2Ar........................................................................................................ , C.-. , .-. , .. , K.-. -- ................................................................ , .. , .. , .. , .. ....................................................................................................................... , .. , .. , .. ............................................................................................ , .. , .. ........................................................................................................................................................ . ....................................... , .. 0.95Ne/0.05Xe....................................................................................................................................................... , .. , .. , .. , .. , ..

- ........................................................ , .. ................................................................. , .. , .. ............................................................................................................... , .. , .. , .. ...................................................................................................................... O2(A1G) H2 : O2 ............................................................................................................. , . ............................................................................................................................ , .. , .. .................................................................................. , .. , .. , .. , .. ................................... , .. , .. , .. .................................................... IV .. , .. , .. , ................................................. , , , : , , .. , .. , .. .................................................................................................................................. , .. * .................................................................................................................................. , .. , .. ...................................................................................................................................... , .. , ..

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